Gordo, P. M.; Liszkay, Laszlo; Havancsák, K.; Skuratov, V. A.; Sperr, Peter; Egger, Werner; Lopes Gil, C.; Lima, Adriano P. de; Kajcsos, Zs.
Document type:
Zeitschriftenartikel / Journal Article
Title:
Comparison of Vacancy Creation by Nuclear and Electronic Processes in Silicon Irradiated with Swift Kr and Bi Ions
Journal:
Materials Science Forum
Issue:
445-446
Conference title:
ICPA 13
Year:
2004
Pages from - to:
93-95
Language:
Englisch
Abstract:
Silicon samples, irradiated with swift Kr (245 MeV) and Bi (710 MeV) ions at room temperature, were investigated using a continuous and a pulsed positron beam and conventional Doppler broadening and lifetime spectroscopy. In the fluence and depth ranges studied, creation of large voids and amorphization was not observed. The dominant defects were found to be divacancies, present from the near surface region all along the ion tracks. We found that the formation of divacancies from ion-induced vacancies as predicted by Monte-Carlo-calculations is higher in the case of the heavier Bi ion. «
Silicon samples, irradiated with swift Kr (245 MeV) and Bi (710 MeV) ions at room temperature, were investigated using a continuous and a pulsed positron beam and conventional Doppler broadening and lifetime spectroscopy. In the fluence and depth ranges studied, creation of large voids and amorphization was not observed. The dominant defects were found to be divacancies, present from the near surface region all along the ion tracks. We found that the formation of divacancies from ion-induced vac... »