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Document type:
Zeitschriftenartikel / Journal Article
Title:
Precise nitrogen depth profiling by high-resolution RBS in combination with angle-resolved XPS
Journal:
Nuclear Instruments and Methods in Physics Research Section B
Volume:
268
Issue:
11-12
Year:
2010
Pages from - to:
1960-1963
Language:
Englisch
Keywords:
Analysis of light elements ; Angle-resolved X-ray photoelectron spectroscopy ; Angle-resolved XPS ; Angular dependence ; Combination analysis ; Elastic recoil detection ; High resolution ; High-K gate stacks ; High-resolution RBS ; Light elements ; Nitrogen depth profiles ; Nitrogen depth profiling ; Nitrogen profile ; XPS, Chemical elements ; Nitrogen ; Rutherford backscattering spectroscopy ; Semiconducting silicon ; Spectrum analysis ; X ray photoelectron spectroscopy, Depth... »
Abstract:
Nitrogen depth profiling in a high-k gate stack structure, SiON/HfO2/SiON/Si(0 0 1) was performed by high-resolution Rutherford backscattering spectroscopy (HRBS) in combination with angle-resolved X-ray photoelectron spectroscopy (AR-XPS). The nitrogen depth profile is determined so that both the HRBS spectrum and the angular dependence of the XPS yield are reproduced. The obtained nitrogen profile is compared with the result of high-resolution elastic recoil detection (ERD) which is the most r... »
ISSN:
0168-583X
Department:
Fakultät für Luft- und Raumfahrttechnik
Institute:
LRT 2 - Institut für angewandte Physik und Messtechnik
Chair:
Dollinger, Günther
Open Access yes or no?:
Nein / No
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