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Document type:
Konferenzbeitrag / Conference Paper
Title:
Estimation of the cycle time distribution of a wafer fab by a simple simulation model
Title of conference publication:
Proceedings of the 1999 International Conference on Semiconductor Manufacturing Operational Modeling and Simulation
Subtitle of conference publication:
1999 Western MultiConference, San Francisco, California, January 17 - 20, 1999, Cathedral Hill Hotel
Conference title:
International Conference on Semiconductor Manufacturing Operational Modeling and Simulation (1999, San Francisco, CA)
Conference title:
SMOMS '99
Venue:
San Francisco
Year of conference:
1999
Date of conference beginning:
17.01.1999
Date of conference ending:
20.01.1999
Place of publication:
San Diego, Calif.
Publisher:
SCS
Year:
1999
Pages from - to:
118
Language:
Englisch
ISBN:
1-56555-161-3
Open Access yes or no?:
Nein / No
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