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Document type:
Konferenzbeitrag / Conference Paper
Title:
Framework for Performance Assessment of Shop-Floor Control Systems
Title of conference publication:
Proceedings of the International Conference on Modeling and Analysis of Semiconductor Manufacturing Conference (MASM 2002)
Subtitle of conference publication:
Tempe, USA
Conference title:
International Conference on Modeling and Analysis of Semiconductor Manufacturing (1., 2002, Tempe, AZ)
Venue:
Tempe, ISA
Year of conference:
2002
Year:
2002
Pages from - to:
95-100
Language:
Englisch
Open Access yes or no?:
Nein / No
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