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Document type:
Konferenzbeitrag / Conference Paper
Title:
Approximation of the cycle time of cluster tools in semiconductor manufacturing
Title of conference publication:
IIE Annual Conference and Exhibition 2004
Subtitle of conference publication:
Conference Proceedings
Organizer (entity):
Institute of Industrial and Systems Engineers (IISE)
Conference title:
IIE Annual Conference and Expo (54., 2004, Houston, TX)
Venue:
Houston, Texas, USA
Year of conference:
2004
Date of conference beginning:
15.05.2004
Date of conference ending:
19.05.2004
Place of publication:
[Norcross, GA]
Publishing institution:
Institute of Industrial Engineers
Year:
2004
Pages from - to:
1
Language:
Englisch
Open Access yes or no?:
Nein / No
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