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Dokumenttyp:
Zeitschriftenartikel / Journal Article
Titel:
Electron-stimulated hydrogen desorption from diamond surfaces and its influence on the low-pressure synthesis of diamond
Zeitschrift:
Applied Physics Letters
Jahrgang:
81
Heftnummer:
26
Jahr:
2002
Seiten von - bis:
5027-5029
Sprache:
Englisch
Stichwörter:
diamond ; chemical vapour deposition ; materials preparation ; electron stimulated desorption ; deuterium ; boron ; adsorbed layers ; nitrogen
Abstract:
A total cross section σD = (5±2.6)×10e−18 cm2 is measured for electron-stimulated desorption (ESD) of deuterium from a boron-doped, deuterated diamond(100) surface at 5 eV incident electron energy. This large ESD cross section means a significant contribution of ESD to hydrogen abstraction reactions in microwave-driven chemical vapor deposition of diamond. The ESD cross section decreases when changing to a nitrogen-doped diamond. This change is suggested to be the reason for the reported influen... »
ISSN:
0003-6951
DOI:
URL zum Inhalt:
Fakultät:
Fakultät für Luft- und Raumfahrttechnik
Institut:
LRT 2 - Institut für angewandte Physik und Messtechnik
Professur:
Dollinger, Günther
Open Access ja oder nein?:
Nein / No
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