Gordo, P. M.; Liszkay, Laszlo; Havancsák, K.; Skuratov, V. A.; Sperr, Peter; Egger, Werner; Lopes Gil, C.; Lima, Adriano P. de; Kajcsos, Zs.
Dokumenttyp:
Zeitschriftenartikel / Journal Article
Titel:
Comparison of Vacancy Creation by Nuclear and Electronic Processes in Silicon Irradiated with Swift Kr and Bi Ions
Zeitschrift:
Materials Science Forum
Heftnummer:
445-446
Konferenztitel:
ICPA 13
Jahr:
2004
Seiten von - bis:
93-95
Sprache:
Englisch
Abstract:
Silicon samples, irradiated with swift Kr (245 MeV) and Bi (710 MeV) ions at room temperature, were investigated using a continuous and a pulsed positron beam and conventional Doppler broadening and lifetime spectroscopy. In the fluence and depth ranges studied, creation of large voids and amorphization was not observed. The dominant defects were found to be divacancies, present from the near surface region all along the ion tracks. We found that the formation of divacancies from ion-induced vacancies as predicted by Monte-Carlo-calculations is higher in the case of the heavier Bi ion. «
Silicon samples, irradiated with swift Kr (245 MeV) and Bi (710 MeV) ions at room temperature, were investigated using a continuous and a pulsed positron beam and conventional Doppler broadening and lifetime spectroscopy. In the fluence and depth ranges studied, creation of large voids and amorphization was not observed. The dominant defects were found to be divacancies, present from the near surface region all along the ion tracks. We found that the formation of divacancies from ion-induced vac... »