A total cross section σD = (5±2.6)×10e−18 cm2 is measured for electron-stimulated desorption (ESD) of deuterium from a boron-doped, deuterated diamond(100) surface at 5 eV incident electron energy. This large ESD cross section means a significant contribution of ESD to hydrogen abstraction reactions in microwave-driven chemical vapor deposition of diamond. The ESD cross section decreases when changing to a nitrogen-doped diamond. This change is suggested to be the reason for the reported influence of small concentrations of nitrogen or boron added to the process gas on diamond growth.
«A total cross section σD = (5±2.6)×10e−18 cm2 is measured for electron-stimulated desorption (ESD) of deuterium from a boron-doped, deuterated diamond(100) surface at 5 eV incident electron energy. This large ESD cross section means a significant contribution of ESD to hydrogen abstraction reactions in microwave-driven chemical vapor deposition of diamond. The ESD cross section decreases when changing to a nitrogen-doped diamond. This change is suggested to be the reason for the reported influen...
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