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Document type:
Konferenzbeitrag / Conference Paper
Title:
High resolution depth profiling of light elements in silicon nanostructures utilizing elastic recoil detection (ERD)
Title of conference publication:
3rd Workshop on Innovative Circuits and Systems for Nanoelectronics, Nano-EL 98, München 1998, Proceedings
Conference title:
Workshop on Innovative Circuits and Systems for Nanoelectronics (3., 1998, München)
Conference title:
Nano-El ´98
Venue:
München
Year of conference:
1998
Place of publication:
Munich, Germany
Year:
1998
Pages from - to:
A4-1
Language:
Englisch
Article ID:
A4-1
Department:
Fakultät für Luft- und Raumfahrttechnik
Institute:
LRT 2 - Institut für angewandte Physik und Messtechnik
Chair:
Dollinger, Günther
Open Access yes or no?:
Nein / No
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