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Document type:
Konferenzbeitrag / Conference Paper
Title:
Characterization of the b and as pile-up at the si-sio2 interface
Title of conference publication:
Ultra Shallow Junctions
Subtitle of conference publication:
7th International Workshop Fabrication, Characterization and Modeling of Ultra Shallow Doping Profiles in Semic
Conference title:
International Workshop Fabrication, Characterization and Modeling of Ultra Shallow Doping Profiles in Semic (7., 2003, Santa Cruz, CA)
Conference title:
USJ-2003
Venue:
Santa Cruz, CA, USA
Year of conference:
2003
Date of conference beginning:
27.04.2003
Year:
2003
Language:
Englisch
Department:
Fakultät für Luft- und Raumfahrttechnik
Institute:
LRT 2 - Institut für angewandte Physik und Messtechnik
Chair:
Dollinger, Günther
Open Access yes or no?:
Nein / No
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