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Document type:
Zeitschriftenartikel / Journal Article
Title:
Quantitative analysis of deuterium in a-C:D layers, a Round Robin experiment
Journal:
Journal of Nuclear Materials
Volume:
281
Issue:
1
Year:
2000
Pages from - to:
42-56
Language:
Englisch
Keywords:
Amorphous materials ; Carbon ; Desorption ; Glow discharges ; Ion beams ; Plasma applications ; Secondary ion mass spectrometry ; Silicon ; Substrates, Deuterated carbon ; Thermal desorption spectrometry (TDS), Deuterium
Abstract:
The absolute amount of deuterium in amorphous deuterated carbon (a-C:D) layers has been measured by six laboratories with different techniques, such as MeV ion beam analysis, secondary ion mass spectrometry (SIMS), and thermal desorption spectrometry (TDS). The a-C:D layers have been deposited from a CD4 glow discharge plasma onto carbon and silicon substrates. The results for the absolute numbers obtained with the different analyzing techniques show a scatter of up to about 35
ISSN:
0022-3115
Department:
Fakultät für Luft- und Raumfahrttechnik
Institute:
LRT 2 - Institut für angewandte Physik und Messtechnik
Chair:
Dollinger, Günther
Open Access yes or no?:
Nein / No
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