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Document type:
Zeitschriftenartikel / Journal Article
Title:
Doping density depth profiling analysis with high resolution elastic recoil detection
Title of conference publication:
212th ECS Meeting
Journal:
ECS Transactions
Volume:
11
Issue:
3
Conference title:
Electrochemical Society Meeting (212., 2007, Washington, DC)
Venue:
Washington, DC
Year of conference:
2007
Date of conference beginning:
07.10.2007
Date of conference ending:
12.10.2007
Year:
2007
Pages from - to:
243-255
Language:
Englisch
Keywords:
Depth-profiling analysis ; Diagnostic techniques ; Doping densities ; Elastic recoil detection (ERD) ; Electrochemical Society (ECS) ; High resolutions ; In order ; lattice locations ; light elements ; Magnetic (CE) ; Microelectronic materials ; Quantitative analysis ; Sub-nanometer resolution ; Ultra thin layers ; Ultra-thin film (UTF), Blood vessel prostheses ; Chemical elements ; Coatings ; Depth profiling ; Electric conductivity ; Health ; Impurities ; Pigments ; Semico... »
Abstract:
The quantitative analysis of light elements in ultra thin films thinner than 10 nm is still a nontrivial task. This paper summarizes the prospects of high-resolution Elastic Recoil Detection (ERD) using a Q3D magnetic spectrograph. It is shown that sub-nanometer resolution can be achieved in ultra thin films and even monolayer resolution is possible close to the surface. ERD has the best quantification possibilities compared to any other method. Sensitivity is sufficient to analyze main elements... »
ISSN:
1938-5862
DOI:
Department:
Fakultät für Luft- und Raumfahrttechnik
Institute:
LRT 2 - Institut für angewandte Physik und Messtechnik
Chair:
Dollinger, Günther
Open Access yes or no?:
Nein / No
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