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Document type:
Zeitschriftenartikel / Journal Article
Title:
Detection of nitrogen in CVD diamond
Journal:
Diamond and Related Materials
Volume:
5
Issue:
9
Year:
1996
Pages from - to:
995-997
Language:
Englisch
Keywords:
CVD diamond ; ERD ; Morphology ; Nitrogen content
Abstract:
A series of CVD diamond films was analysed for their nitrogen content by high resolution elastic recoil detection (ERD) in order to investigate the incorporation of nitrogen from the gas phase in a CVD reactor into the growing diamond film. CVD diamond films were deposited from a mixture of 1.5
ISSN:
0925-9635
Department:
Fakultät für Luft- und Raumfahrttechnik
Institute:
LRT 2 - Institut für angewandte Physik und Messtechnik
Chair:
Dollinger, Günther
Open Access yes or no?:
Nein / No
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