Quantitative depth profiles of light and medium heavy elements can be obtained by elastic recoil detection analysis (ERDA) with heavy ions due to well known scattering cross sections and stopping powers. However, the transformation of the measured spectra (count rate versus energy) into concentration profiles is a nontrivial task in general. Therefore, based on a similar algorithm for the transformation of RBS-spectra a matrix algorithm was developed which allows to transform ERDA-spectra directly into depth profiles. This procedure can also be used to calculate depth profiles from high resolution experiments where a depth resolution better than 1 nm can be achieved. An example of ERDA-measurements demonstrates the performance of this method in determining quantitative depth profiles.    «

Quantitative depth profiles of light and medium heavy elements can be obtained by elastic recoil detection analysis (ERDA) with heavy ions due to well known scattering cross sections and stopping powers. However, the transformation of the measured spectra (count rate versus energy) into concentration profiles is a nontrivial task in general. Therefore, based on a similar algorithm for the transformation of RBS-spectra a matrix algorithm was developed which allows to transform ERDA-spectra direct...    »