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Document type:
Zeitschriftenartikel / Journal Article
Title:
High resolution depth profile analysis by elastic recoil detection with heavy ions
Journal:
Fresenius' Journal of Analytical Chemistry
Volume:
353
Issue:
3-4
Year:
1995
Pages from - to:
311-315
Language:
Englisch
Abstract:
Elastic recoil detection (ERD) with energetic heavy ions (e.g. 60-120 MeV127I) is a suitable method to measure depth profiles of light and medium heavy elements in thin films. The advantages of this method are reliable and quantitative results and elementally and isotopically resolved depth profiles. A relative energy resolution of 0.07
ISSN:
0937-0633
DOI:
Department:
Fakultät für Luft- und Raumfahrttechnik
Institute:
LRT 2 - Institut für angewandte Physik und Messtechnik
Chair:
Dollinger, Günther
Open Access yes or no?:
Nein / No
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