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Document type:
Zeitschriftenartikel / Journal Article
Title:
High resolution elastic recoil detection
Collection editors:
Vizkelethy, G.; McDaniel, F. D.; Thevuthasan, S.; Tesmer, J. R.
Journal:
Nuclear Instruments and Methods in Physics Research Section B
Issue:
219-220 (1-4)
Year:
2004
Pages from - to:
333-343
Language:
Englisch
Keywords:
Chemical analysis ; Elasticity ; Electron microscopy ; Hydrogen ; Impurities ; Monolayers ; Sensitivity analysis ; Surface treatment ; Crystalline ultra thin layers ; Elastic recoil detection (ERD) ; Light elements, Ultrathin films
Abstract:
The quantitative analysis of light elements in ultra thin films being thinner than 10 nm is still a nontrivial task. This paper will summarise the prospects of high resolution elastic recoil detection (ERD) using a Q3D magnetic spectrograph. It has been shown that subnanometer resolution can be achieved in ultra thin films and even monolayer resolution is possible close to the surface. ERD has best quantification possibilities compared to any other method. Sensitivity is sufficient to analyse ma... »
ISSN:
0168-583X
Department:
Fakultät für Luft- und Raumfahrttechnik
Institute:
LRT 2 - Institut für angewandte Physik und Messtechnik
Chair:
Dollinger, Günther
Open Access yes or no?:
Nein / No
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