Dollinger, Günther; Faestermann, Thomas; Maier-Komor, Paul
Document type:
Zeitschriftenartikel / Journal Article
Title:
High resolution depth profiling of light elements
Journal:
Nuclear Instruments and Methods in Physics Research Section B
Volume:
64
Issue:
1-4
Year:
1992
Pages from - to:
422-427
Language:
Englisch
Abstract:
An elastic recoil detection analysis technique with swift heavy ions has been developed to measure high resolution depth profiles of light elements in thin films and multilayer systems. A depth resolution of 1 nm was achieved with a Q3D magnetic spectrograph using a high quality 120 MeV 197Au12 beam. The depth resolution was tested with 12C recoil ions from 12C/11B multilayers. Due to the large solid angle used (2 msr) and large scattering cross sections only low ion currents ( ≈ 109 ions s) are necessary for good statistics within a few minutes of irradiation. The method was applied to depth profile analysis of light elements in a-Si:H/a-SiC:H multilayer systems. Alterations in the multilayers induced by the heavy ion beam have been observed during long lasting irradiations and might limit the depth resolution when profiling small elemental concentrations. «
An elastic recoil detection analysis technique with swift heavy ions has been developed to measure high resolution depth profiles of light elements in thin films and multilayer systems. A depth resolution of 1 nm was achieved with a Q3D magnetic spectrograph using a high quality 120 MeV 197Au12 beam. The depth resolution was tested with 12C recoil ions from 12C/11B multilayers. Due to the large solid angle used (2 msr) and large scattering cross sections only low ion currents ( ≈ 109 ions s) are... »