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Document type:
Zeitschriftenartikel / Journal Article
Title:
Diamond growth with boron addition
Journal:
International Journal of Refractory Metals and Hard Materials
Volume:
16
Issue:
3
Year:
1998
Pages from - to:
223-232
Language:
Englisch
Keywords:
Analytical characterization ; Boron ; Diamond
Abstract:
Diamond coatings were produced on Si substrates by the hot-filament method, with B(C 2H 5) 3 added to the gas phase. Ratios of B(C 2H 5) 3: CH 4 up to 0.01 (10000 ppm) were used which gave boron concentrations up to 3
ISSN:
0263-4368
Department:
Fakultät für Luft- und Raumfahrttechnik
Institute:
LRT 2 - Institut für angewandte Physik und Messtechnik
Chair:
Dollinger, Günther
Open Access yes or no?:
Nein / No
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