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Authors:
Polisski, G.; Kovalev, D.; Dollinger, Günther; Sulima, T.; Koch, Frederick 
Document type:
Zeitschriftenartikel / Journal Article 
Title:
Boron in mesoporous Si - where have all the carriers gone? 
Journal:
Physica. B, Condensed matter 
Issue:
273-274 
Year:
1999 
Pages from - to:
951-954 
Language:
Englisch 
Keywords:
Crystal microstructure ; Electrochemistry ; Electrolytes ; Etching ; Nanostructured materials ; Porous silicon ; Secondary ion mass spectrometry ; Semiconducting boron ; Semiconductor doping, Elastic-recoil detection analysis ; Electrolytic erosions, Semiconducting silicon 
Abstract:
Highly-doped p-type Si is electrochemically etched in an HF-based electrolyte to produce mesoporous surface layers. Using both elastic-recoil detection analysis and secondary ion mass spectroscopy it is concluded that B atoms are not removed from the porous layer. Crystallite size for the most porous samples is related to the average dopant spacing. It is argued that the electrolytic erosion of Si stops when B is in the surface layer and passivated. 
ISSN:
0921-4526 
Department:
Fakultät für Luft- und Raumfahrttechnik 
Institute:
LRT 2 - Institut für angewandte Physik und Messtechnik 
Chair:
Dollinger, Günther 
Open Access yes or no?:
Nein / No