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Authors:
Widmayer, P.; Schwertberger, D.; Wenig, M. J.; Ziemann, P.; Bergmaier, Andreas; Dollinger, Günther 
Document type:
Zeitschriftenartikel / Journal Article 
Title:
Structural response and stress release of hexagonal and cubic boron nitride films due to the bombardment with 170-MeV iodine ions 
Journal:
Diamond and Related Materials 
Volume:
Issue:
10 
Year:
1998 
Pages from - to:
1503-1508 
Language:
Englisch 
Keywords:
Atomic force microscopy ; Cubic boron nitride ; Electron energy loss spectroscopy ; Film preparation ; Fourier transform infrared spectroscopy ; Interferometry ; Iodine ; Ion bombardment ; Radiation damage ; Sputter deposition ; Stresses ; Surface structure, Elastic recoil detection ; Ion beam assisted sputter deposition ; Phase stability ; Reflection electron energy loss spectroscopy ; Stress release; Structural response ; Thin films 
Abstract:
To investigate the stability of the cubic (c-) and the hexagonal (h-) phase of boron nitride (BN) against radiation damage induced predominantly by electronic energy loss processes of high energy density (typical value 25 keV nm-1), thin films prepared by ion-beam-assisted sputter deposition (IBAD) were irradiated at room temperature with 170-MeV iodine ions. Though the average sample stoichiometry, as continuously monitored during the irradiation by elastic recoil detection (ERD), remains uncha...    »
 
ISSN:
0925-9635 
Department:
Fakultät für Luft- und Raumfahrttechnik 
Institute:
LRT 2 - Institut für angewandte Physik und Messtechnik 
Chair:
Dollinger, Günther 
Open Access yes or no?:
Nein / No