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Document type:
Konferenzbeitrag / Conference Paper
Title:
Automated generation and parameterization of throughput models for semiconductor tools
Title of conference publication:
Proceedings of the 2008 Winter Simulation Conference (WSC)
Conference title:
Winter Simulation Conference (40., 2008, Miami, FL)
Venue:
Miami, FL, USA
Year of conference:
2008
Date of conference beginning:
07.12.2008
Date of conference ending:
10.12.2008
Publishing institution:
IEEE
Year:
2008
Pages from - to:
2335-2340
Language:
Englisch
ISBN:
978-1-4244-2707-9
Open Access yes or no?:
Nein / No
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