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Document type:
Konferenzbeitrag / Conference Paper
Title:
Queue time and x-factor characteristics for semiconductor manufacturing with small lot sizes
Title of conference publication:
CASE 2007
Subtitle of conference publication:
IEEE International Conference on Automation Science and Engineering, 2007
Conference title:
IEEE International Conference on Automation Science and Engineering (2007, Scottsdale, AZ)
Venue:
Scottsdale, AZ, USA
Year of conference:
2007
Date of conference beginning:
22.09.2007
Date of conference ending:
25.09.2007
Publishing institution:
IEEE
Year:
2007
Pages from - to:
1069-1074
Language:
Englisch
ISBN:
978-1-4244-1153-5
Open Access yes or no?:
Nein / No
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