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Document type:
Konferenzbeitrag / Conference Paper
Title:
WIP control and calibration in a wafer fab
Collection title:
Simulation Conference (WSC), Proceedings of the 2012 Winter
Title of conference publication:
Proceedings of the 2012 Winter Simulation Conference (WSC)
Conference title:
Winter Simulation Conference (44., 2012, Berlin)
Venue:
Berlin
Year of conference:
2012
Date of conference beginning:
09.12.2012
Date of conference ending:
12.12.2012
Publisher:
IEEE
Year:
2012
Pages from - to:
1-12
Language:
Englisch
ISBN:
978-1-4673-4782-2 ; 978-1-4673-4779-2
Department:
Fakultät für Informatik
Institute:
INF 3 - Institut für Technische Informatik
Chair:
Rose, Oliver
Open Access yes or no?:
Nein / No
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