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- Authors:
- Dubec, Viktor; Bychikhin, Sergey; Pogany, Dionýz; Gornik, Erich; Groos, Gerhard; Stecher, Matthias
- Document type:
- Konferenzbeitrag / Conference Paper
- Title:
- Error analysis in phase extraction in a 2D holographic imaging of semiconductor devices
- Collection editors:
- Jeong, Tung H.; Bjelkhagen, Hans I.
- Title of conference publication:
- Practical Holography XVIII
- Subtitle of conference publication:
- Materials and Applications
- Series title:
- Proceedings SPIE
- Series volume:
- 5290
- Conference title:
- Electronic Imaging (2004, San Jose, CA); IS&T/SPIE Annual Symposium on Electronic Imaging (16., 2004, San Jose, CA)
- Venue:
- San Jose, CA, USA
- Year of conference:
- 2004
- Date of conference beginning:
- 18.01.2004
- Date of conference ending:
- 22.01.2004
- Year:
- 2004
- Pages from - to:
- 233-242
- Language:
- Englisch
- DOI:
- 10.1117/12.526551
- URL:
- https://doi.org/10.1117/12.526551
- Department:
- Fakultät für Elektrotechnik und Technische Informatik
- Institute:
- ETTI 1 - Institut für Physik, Elektrotechnik und Automatisierungstechnik
- Chair:
- Groos, Gerhard
- Open Access yes or no?:
- Nein / No
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