We report on the synthesis of titanium suboxide films using a magnetron sputtering setup. The structure of the produced films is characterized using Raman spectroscopy and X-ray diffraction and electrical properties are measured by four-probe method. The morphology of samples is studied using atomic force and scanning electron microscopy. We demonstrate that depending on the oxidation rate of the growing films it is possible to produce polycrystalline α-TiO, corundum and orthorhombic Ti₂O₃ or almost amorphous TiO₂. We focus on the characterization of the two phases of Ti₂O₃ and show that their structure and electrical properties significantly differ from earlier results obtained for bulk crystals or epitaxial films. Our corundum-type Ti₂O₃ films have high electrical conductivity (compared to the bulk) and no metal-insulator phase transition: the material is locked in the metallic state. The conductivity of our …