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Authors:
Quellmalz, Arne; Wang, Xiaojing; Sawallich, Simon; Uzlu, Burkay; Otto, Martin; Wagner, Stefan; Wang, Zhenxing; Prechtl, Maximilian; Hartwig, Oliver; Luo, Siwei; Duesberg, Georg; Lemme, Max; Gylfason, Kristinn; Roxhed, Niclas; Stemme, Göran; Niklaus, Frank 
Document type:
Zeitschriftenartikel / Journal Article 
Title:
Large-area integration of two-dimensional materials and their heterostructures by wafer bonding 
Journal:
Nature Communications 
Volume:
12 
Year:
2021 
Pages from - to:
917 
Language:
Englisch 
Abstract:
Integrating two-dimensional (2D) materials into semiconductor manufacturing lines is essential to exploit their material properties in a wide range of application areas. However, current approaches are not compatible with high-volume manufacturing on wafer level. Here, we report a generic methodology for large-area integration of 2D materials by adhesive wafer bonding. Our approach avoids manual handling and uses equipment, processes, and materials that are readily available in large-scale semiconductor manufacturing lines. We demonstrate the transfer of CVD graphene from copper foils (100-mm diameter) and molybdenum disulfide (MoS2) from SiO2/Si chips (centimeter-sized) to silicon wafers (100-mm diameter). Furthermore, we stack graphene with CVD hexagonal boron nitride and MoS2 layers to heterostructures, and fabricate encapsulated field-effect graphene devices, with high carrier mobilities of up to 4520cm2V−1s−1. Thus, our approach is suited for backend of the line integration of 2D materials on top of integrated circuits, with potential to accelerate progress in electronics, photonics, and sensing. 
Article ID:
917 
Department:
Fakultät für Elektrotechnik und Informationstechnik 
Institute:
EIT 2 - Institut für Physik 
Chair:
Düsberg, Georg 
Open Access yes or no?:
Ja / Yes 
Type of OA license:
CC BY 4.0