Fischer, Mark; Gsell, Stefan; Schreck, Matthias; Bergmaier, Andreas
Document type:
Zeitschriftenartikel / Journal Article
Title:
Growth sector dependence and mechanism of stress formation in epitaxial diamond growth
Journal:
Applied Physics Letters
Volume:
100
Issue:
4
Year:
2012
Pages from - to:
041906
Language:
Englisch
Abstract:
Stress generation in epitaxial diamond growth was investigated by µ-Raman spectroscopy and high resolution x-ray diffraction. Intrinsic stress could be varied systematically from compressive to tensile covering a huge range of 5 GPa. The temperature-stress curve for growth on 111-sectors as compared to 001 shows a shift of -200 °C or +2 GPa. A crucial role of hydrogen in the stress formation process is excluded. Due to the absence of grain boundaries, a model is proposed which is based on the "effective climb" of individual dislocations. The controlled generation of stress profiles offers a powerful concept for strengthening diamond mechanical devices. «
Stress generation in epitaxial diamond growth was investigated by µ-Raman spectroscopy and high resolution x-ray diffraction. Intrinsic stress could be varied systematically from compressive to tensile covering a huge range of 5 GPa. The temperature-stress curve for growth on 111-sectors as compared to 001 shows a shift of -200 °C or +2 GPa. A crucial role of hydrogen in the stress formation process is excluded. Due to the absence of grain boundaries, a model is proposed which is based on the "e... »