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Authors:
Schels, Andreas; Herdl, Florian; Hausladen, Matthias; Wohlfartsstätter, Dominik; Edler, Simon; Bachmann, Michael; Pahlke, Andreas; Schreiner, Rupert; Hansch, Walter 
Document type:
Zeitschriftenartikel / Journal Article 
Title:
Quantitative Field Emission Imaging for Studying the Doping-Dependent Emission Behavior of Silicon Field Emitter Arrays 
Journal:
Micromachines 
Volume:
14 
Issue:
11 
Year:
2023 
Pages from - to:
2008 
Language:
Englisch 
Keywords:
field emission ; field-emitter arrays ; field emission imaging ; silicon field-emitter array ; doping dependent ; p-type silicon 
Abstract:
Field emitter arrays (FEAs) are a promising component for novel vacuum micro- and nanoelectronic devices, such as microwave power amplifiers or fast-switching X-ray sources. However, the interrelated mechanisms responsible for FEA degradation and failure are not fully understood. Therefore, we present a measurement method for quantitative observation of individual emission sites during integral operation using a low-cost, commercially available CMOS imaging sensor. The emission and deg...    »
 
Article ID:
2008 
Department:
Fakultät für Elektrotechnik und Informationstechnik 
Institute:
EIT 2 - Institut für Physik 
Chair:
Hansch, Walter 
Open Access yes or no?:
Ja / Yes 
Type of OA license:
CC BY 4.0