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Document type:
Konferenzbeitrag / Conference Paper
Title:
LARGE-A torch to determine and model plasma physics and behavior for CVD process applications
Title of conference publication:
2008 IEEE 35th International Conference on Plasma Science
Conference title:
IEEE International Conference on Plasma Science (35., 2008, Karlsruhe)
Venue:
Karlsruhe, Germany
Year of conference:
2008
Date of conference beginning:
15.06.2008
Date of conference ending:
19.06.2008
Place of publication:
Piscataway, NJ
Publisher:
IEEE
Year:
2008
Language:
Englisch
ISBN:
978-1-4244-1929-6
Department:
Fakultät für Elektrotechnik und Informationstechnik
Institute:
EIT 1 - Institut für Plasmatechnik und Mathematik
Chair:
Schein, Jochen
Open Access yes or no?:
Nein / No
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