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Document type:
Konferenzbeitrag / Conference Paper
Title:
Suspended Two-Dimensional Material Membranes For Sensor Applications Fabricated With A High-Yield Transfer Process
Title of conference publication:
2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS)
Conference title:
International Conference on Micro Electro Mechanical Systems (36., 2023, München)
Venue:
München
Year of conference:
2023
Date of conference beginning:
15.01.2023
Date of conference ending:
19.01.2023
Place of publication:
Piscataway, NJ
Publisher:
IEEE
Year:
2023
Pages from - to:
627-630
Language:
Englisch
Keywords:
suspended 2D materials ; graphene ; PtSe2 ; MoS2 ; transition metal dichalcogenides ; membrane-based sensors
Abstract:
This paper reports a novel dry-transfer method for suspending
and patterning two-dimensional (2D) materials
across closed (sealed) cavities on a target substrate. The
process utilizes handling frames and heat to ensure sufficient
adhesion and a multi-layer resist stack to pattern the
suspended thin films. The yield of intact suspended monolayer
graphene membranes is up to more than 75 %, higher
than formerly reported [1]–[3]. The process also demonstrates
high yields of intact me... »
ISBN:
978-1-6654-9308-6 ; 978-1-6654-9309-3
Department:
Fakultät für Elektrotechnik und Informationstechnik
Institute:
EIT 2 - Institut für Physik
Chair:
Düsberg, Georg S.
Project:
ForMicro-NobleNEMS ; Graphene Flagship Core 3 ; ULISSES
Open Access yes or no?:
Nein / No
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