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Authors:
Lukas, Sebastian; Jangra, Vikas; Rademacher, Nico; Gross, Michael; Desgué, Eva; Prechtl, Maximilian; Hartwig, Oliver; Ó Coileáin, Cormac; Stimpel-Lindner, Tanja; Kataria, Satender; Legagneux, Pierre; Duesberg,Georg S.; Lemme, Max C. 
Document type:
Konferenzbeitrag / Conference Paper 
Title:
Freely Suspended Platinum Diselenide Membranes without Polymer Support for Piezoresistive Pressure Sensing 
Title of conference publication:
2023 Device Research Conference (DRC) 
Organizer (entity):
University of California 
Conference title:
Device Research Conference (2023, Santa Barbara, Calif.) 
Venue:
Santa Barbara, Calif., USA 
Year of conference:
2023 
Date of conference beginning:
25.06.2023 
Date of conference ending:
28.06.2023 
Place of publication:
Piscataway, NJ 
Publisher:
IEEE 
Year:
2023 
Pages from - to:
1-2 
Language:
Englisch 
Abstract:
Platinum diselenide (PtSe2) is a layered two-dimensional (2D) material with outstanding electronic and piezoresistive properties [1–3]. It has demonstrated its potential for membrane-based pressure sensor devices, where poly(methyl methacrylate) (PMMA) supported and suspended the PtSe2 membranes [4]. The impact of the polymer support layer on the response of the suspended 2D material is still under investigation [5]. To study the strain and the piezoresistive behavior, we fabricated and analyzed devices based on suspended PtSe2 membranes with and without polymer support. 
ISBN:
979-8-3503-2310-8 ; 979-8-3503-2311-5 
Department:
Fakultät für Elektrotechnik und Informationstechnik 
Institute:
EIT 2 - Institut für Physik 
Chair:
Düsberg, Georg S. 
Project:
ForMikro-NobleNEMS ; Graphene Flagship Core 3 
Open Access yes or no?:
Nein / No