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Autoren:
Vijayakumar, Vijesh 
Dokumenttyp:
Dissertation / Thesis 
Titel:
Development of a Quality Management System for a Semiconductor Research Institute 
Betreuer:
Hansch, Walter, Univ.-Prof. Dr.-Ing. 
Gutachter:
Hansch, Walter, Univ.-Prof. Dr.-Ing.; Schein, Jochen, Univ.-Prof. Dr.-Ing. 
Tag der mündlichen Prüfung:
12.08.2015 
Publikationsdatum:
12.07.2016 
Jahr:
2015 
Sprache:
Englisch 
Subject:
Halbleitertechnologie ; Herstellkosten ; Forschungseinrichtung ; Qualitätsmanagement ; Speicherprogrammierte Steuerung ; Diffraktives optisches Element ; Hochschulschrift 
Stichwörter:
Quality management, SPC, DOE, Cornerstone, Content management system, Plone 
Abstract:
Manufacturing processes in semiconductor industries are performed on a large scale to keep the production cost of every manufactured chip as low as possible. Process parameters are seldom varied when manufacturing is performed on a large scale. However, the situation is different in a semiconductor research institute wherein multiple processes are performed simultaneously, which require frequent changes in the process parameters and operating conditions. Due to continuous changes in the process...    »
 
DDC-Notation:
621.38152 
Fakultät:
Fakultät für Elektrotechnik und Informationstechnik 
Institut:
EIT 2 - Institut für Physik 
Professur:
Hansch, Walter 
Open Access ja oder nein?:
Ja / Yes