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- Authors:
- Fowler, John W.; Jang, Young Jae; Kalir, Adar; Lendermann, Peter; Mönch, Lars; Rose, Oliver; Seidel, Georg; Yugma, Claude
- Document type:
- Konferenzbeitrag / Conference Paper
- Title:
- Simulation in Semiconductor Manufacturing Between 2000 and 2050
- Subtitle:
- Lessons Learned and Future Expectations
- Title of conference publication:
- Proceedings of the 2025 Winter Simulation Conference
- Conference title:
- Winter Simulation Conference (2025, Seattle, Wash.)
- Venue:
- Seattle, WA
- Year of conference:
- 2025
- Date of conference beginning:
- 07.12.2025
- Date of conference ending:
- 10.12.2025
- Place of publication:
- Piscataway, NJ
- Publisher:
- IEEE
- Year:
- 2025
- Pages from - to:
- 1649-1663
- Language:
- Englisch
- ISBN:
- 979-8-3315-8726-0
- DOI:
- 10.1109/WSC68292.2025.11339052
- URL:
- https://doi.org/10.1109/WSC68292.2025.11339052
- Department:
- Fakultät für Informatik
- Institute:
- INF 3 - Institut für Technische Informatik
- Chair:
- Rose, Oliver
- Open Access yes or no?:
- Nein / No
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