This paper reports a novel dry-transfer method for suspending
and patterning two-dimensional (2D) materials
across closed (sealed) cavities on a target substrate. The
process utilizes handling frames and heat to ensure sufficient
adhesion and a multi-layer resist stack to pattern the
suspended thin films. The yield of intact suspended monolayer
graphene membranes is up to more than 75 %, higher
than formerly reported [1]–[3]. The process also demonstrates
high yields of intact membranes of double-layer graphene
and of two different transition metal dichalcogenides.
The process flow can be applied to the fabrication of
various sensor applications, such as pressure sensors. «
This paper reports a novel dry-transfer method for suspending
and patterning two-dimensional (2D) materials
across closed (sealed) cavities on a target substrate. The
process utilizes handling frames and heat to ensure sufficient
adhesion and a multi-layer resist stack to pattern the
suspended thin films. The yield of intact suspended monolayer
graphene membranes is up to more than 75 %, higher
than formerly reported [1]–[3]. The process also demonstrates
high yields of intact me... »