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Document type:
Konferenzbeitrag / Conference Paper
Title:
Simulation analysis of semiconductor manufacturing with small lot size and batch tool replacements
Collection title:
Proceedings of the 40th Conference on Winter Simulation
Conference title:
Winter Simulation Conference (40., 2008, Miami, FL)
Venue:
Miami, Fl
Year of conference:
2008
Date of conference beginning:
07.12.2008
Date of conference ending:
10.12.2008
Year:
2008
Pages from - to:
2118-2126
Language:
Englisch
ISBN:
978-1-4244-2708-6
BibTeX