Positron beam lifetime spectroscopy has been utilized to study the depth distribution of vacancy-type defects in molecular beam epitaxy GaAs grown at low temperature. Lifetime spectra were measured as a function of positron energy. From the analysis of the positron lifetime in as-grown and annealed low temperature grown GaAs, the concentrations of Ga monovacancies and voids are estimated. Our results show that in an as-grown sample the Ga monovacancy concentration is > 3×1018 cm-3. It is also known that vacancy-cluster concentration in an annealed sample exceeds 1018 cm-3 with a nonuniform spatial distribution. © 1996 American Institute of Physics.    «

Positron beam lifetime spectroscopy has been utilized to study the depth distribution of vacancy-type defects in molecular beam epitaxy GaAs grown at low temperature. Lifetime spectra were measured as a function of positron energy. From the analysis of the positron lifetime in as-grown and annealed low temperature grown GaAs, the concentrations of Ga monovacancies and voids are estimated. Our results show that in an as-grown sample the Ga monovacancy concentration is > 3×1018 cm-3. It is also kn...    »