Bauer-Kugelmann, Werner; Kögel, Gottfried; Sperr, Peter; Triftshäuser, Werner
Dokumenttyp:
Zeitschriftenartikel / Journal Article
Titel:
Positron lifetimes and positron moderation of 4H-SiC subjected to various treatments
Zeitschrift:
Materials Science Forum
Heftnummer:
255-257
Jahr:
1997
Seiten von - bis:
662-664
Sprache:
Englisch
Abstract:
Epitaxial p-SiC layers on n-SiC substrates have been exposed to ion implantation, surface oxidation and post irradiation annealing prior to investigation by the Munich pulsed positron beam in order to obtain a better understanding of positron diffusion, defect trapping and positron re-emission. In the oxide layer, a fraction of up to 40