We introduce proton-proton scattering at a microprobe of 17 MeV protons to quantitatively image three dimensional hydrogen distributions in polycrystalline diamond at a lateral resolution better than 1 μm and high sensitivity. The images show that most of the hydrogen of a 〈110〉-textured undoped polycrystalline diamond film is located at grain boundaries. The average amount of hydrogen is (8.1±1.5)·10 14 atoms/cm 2 along the grain boundaries which corresponds to about a third of a monolayer. The content within the grain is below the detection limit of 1.4-10 16 atoms/cm 2 (0.08 at-ppm). «
We introduce proton-proton scattering at a microprobe of 17 MeV protons to quantitatively image three dimensional hydrogen distributions in polycrystalline diamond at a lateral resolution better than 1 μm and high sensitivity. The images show that most of the hydrogen of a 〈110〉-textured undoped polycrystalline diamond film is located at grain boundaries. The average amount of hydrogen is (8.1±1.5)·10 14 atoms/cm 2 along the grain boundaries which corresponds to about a third of a monolayer. The... »