CVD diamond samples were investigated for their content of light elements and their influence on the physical properties by high resolution elastic recoil detection (ERD) analysis. ERD allows quantitative measurements of depth profiles for all light elements with a depth resolution better than 1 nm (near the surface) using 58Ni or 127I ions with a specific energy of about 1 MeV per nucleus and a high resolution magnetic spectrograph. The measurements were focused on the content of hydrogen in (100)-oriented CVD diamond 90 μm thick grown on (100) silicon. The hydrogen content varied from 0.07 at.    «

CVD diamond samples were investigated for their content of light elements and their influence on the physical properties by high resolution elastic recoil detection (ERD) analysis. ERD allows quantitative measurements of depth profiles for all light elements with a depth resolution better than 1 nm (near the surface) using 58Ni or 127I ions with a specific energy of about 1 MeV per nucleus and a high resolution magnetic spectrograph. The measurements were focused on the content of hydrogen in (1...    »