The quality of CVD diamond films degrades severely with decreasing substrate temperatures. In this report, the impurity and defect incorporation in diamond films deposited from a carbon-hydrogen-oxygen gas system at substrate temperatures between 560 and 345 °C has been investigated using elastic recoil detection (ERD), FTIR and micro-Raman spectroscopy. In approaching the low temperature limit which coincides with the formation of cauliflower morphologies, the hydrogen incorporation rises steeply. Hydrogen contents beyond 1 at.    «

The quality of CVD diamond films degrades severely with decreasing substrate temperatures. In this report, the impurity and defect incorporation in diamond films deposited from a carbon-hydrogen-oxygen gas system at substrate temperatures between 560 and 345 °C has been investigated using elastic recoil detection (ERD), FTIR and micro-Raman spectroscopy. In approaching the low temperature limit which coincides with the formation of cauliflower morphologies, the hydrogen incorporation rises steep...    »