Dollinger, Günther; Frey, C. M.; Bergmaier, Andreas; Faestermann, Thomas
Dokumenttyp:
Zeitschriftenartikel / Journal Article
Titel:
Depth profile analysis with monolayer resolution using elastic recoil detection (ERD)
Zeitschrift:
Europhysics Letters (EPL)
Jahrgang:
42
Heftnummer:
1
Jahr:
1998
Seiten von - bis:
25-30
Sprache:
Englisch
Abstract:
The conditions for obtaining optimum depth resolution in elastic recoil detection (ERD) analysis of thin films using high-energy heavy ions are investigated. We estimate the principle limits given by energy straggling and small-angle scattering effects and show that monolayer depth resolution can be expected under optimized experimental conditions. Such a resolution is demonstrated in an ERD experiment for the first time by discrete signals of adjacent (002) graphite layers which is obtained using a 60 MeV 127I 23+ ion beam and detecting 12C 5+ recoils with a magnetic spectrograph. «
The conditions for obtaining optimum depth resolution in elastic recoil detection (ERD) analysis of thin films using high-energy heavy ions are investigated. We estimate the principle limits given by energy straggling and small-angle scattering effects and show that monolayer depth resolution can be expected under optimized experimental conditions. Such a resolution is demonstrated in an ERD experiment for the first time by discrete signals of adjacent (002) graphite layers which is obtained usi... »