Hartmann, P.; Bohr, S.; Haubner, R.; Lux, B.; Wurzinger, P.; Griesser, M.; Bergmaier, Andreas; Dollinger, Günther; Sternschulte, H.; Sauer, Roman
Dokumenttyp:
Zeitschriftenartikel / Journal Article
Titel:
Diamond growth with boron addition
Zeitschrift:
International Journal of Refractory Metals and Hard Materials
Jahrgang:
16
Heftnummer:
3
Jahr:
1998
Seiten von - bis:
223-232
Sprache:
Englisch
Stichwörter:
Analytical characterization ; Boron ; Diamond
Abstract:
Diamond coatings were produced on Si substrates by the hot-filament method, with B(C 2H 5) 3 added to the gas phase. Ratios of B(C 2H 5) 3: CH 4 up to 0.01 (10000 ppm) were used which gave boron concentrations up to 3