Login
Dokumenttyp:
Zeitschriftenartikel / Journal Article
Titel:
High resolution elastic recoil detection
Herausgeber Sammlung:
Vizkelethy, G.; McDaniel, F. D.; Thevuthasan, S.; Tesmer, J. R.
Zeitschrift:
Nuclear Instruments and Methods in Physics Research Section B
Heftnummer:
219-220 (1-4)
Jahr:
2004
Seiten von - bis:
333-343
Sprache:
Englisch
Stichwörter:
Chemical analysis ; Elasticity ; Electron microscopy ; Hydrogen ; Impurities ; Monolayers ; Sensitivity analysis ; Surface treatment ; Crystalline ultra thin layers ; Elastic recoil detection (ERD) ; Light elements, Ultrathin films
Abstract:
The quantitative analysis of light elements in ultra thin films being thinner than 10 nm is still a nontrivial task. This paper will summarise the prospects of high resolution elastic recoil detection (ERD) using a Q3D magnetic spectrograph. It has been shown that subnanometer resolution can be achieved in ultra thin films and even monolayer resolution is possible close to the surface. ERD has best quantification possibilities compared to any other method. Sensitivity is sufficient to analyse ma... »
ISSN:
0168-583X
Fakultät:
Fakultät für Luft- und Raumfahrttechnik
Institut:
LRT 2 - Institut für angewandte Physik und Messtechnik
Professur:
Dollinger, Günther
Open Access ja oder nein?:
Nein / No
BibTeX