Dollinger, Günther; Bergmaier, Andreas; Faestermann, Thomas; Frey, C. M.
Dokumenttyp:
Zeitschriftenartikel / Journal Article
Titel:
High resolution depth profile analysis by elastic recoil detection with heavy ions
Zeitschrift:
Fresenius' Journal of Analytical Chemistry
Jahrgang:
353
Heftnummer:
3-4
Jahr:
1995
Seiten von - bis:
311-315
Sprache:
Englisch
Abstract:
Elastic recoil detection (ERD) with energetic heavy ions (e.g. 60-120 MeV127I) is a suitable method to measure depth profiles of light and medium heavy elements in thin films. The advantages of this method are reliable and quantitative results and elementally and isotopically resolved depth profiles. A relative energy resolution of 0.07