Doping density depth profiling analysis with high resolution elastic recoil detection
Titel Konferenzpublikation:
212th ECS Meeting
Zeitschrift:
ECS Transactions
Jahrgang:
11
Heftnummer:
3
Konferenztitel:
Electrochemical Society Meeting (212., 2007, Washington, DC)
Tagungsort:
Washington, DC
Jahr der Konferenz:
2007
Datum Beginn der Konferenz:
07.10.2007
Datum Ende der Konferenz:
12.10.2007
Jahr:
2007
Seiten von - bis:
243-255
Sprache:
Englisch
Stichwörter:
Depth-profiling analysis ; Diagnostic techniques ; Doping densities ; Elastic recoil detection (ERD) ; Electrochemical Society (ECS) ; High resolutions ; In order ; lattice locations ; light elements ; Magnetic (CE) ; Microelectronic materials ; Quantitative analysis ; Sub-nanometer resolution ; Ultra thin layers ; Ultra-thin film (UTF), Blood vessel prostheses ; Chemical elements ; Coatings ; Depth profiling ; Electric conductivity ; Health ; Impurities ; Pigments ; Semiconductor devices ; Sensitivity analysis ; Solids ; Thick films ; Thin films ; Threshold current density, Semiconductor materials «
Depth-profiling analysis ; Diagnostic techniques ; Doping densities ; Elastic recoil detection (ERD) ; Electrochemical Society (ECS) ; High resolutions ; In order ; lattice locations ; light elements ; Magnetic (CE) ; Microelectronic materials ; Quantitative analysis ; Sub-nanometer resolution ; Ultra thin layers ; Ultra-thin film (UTF), Blood vessel prostheses ; Chemical elements ; Coatings ; Depth profiling ; Electric conductivity ; Health ; Impurities ; Pigments ; Semico... »
Abstract:
The quantitative analysis of light elements in ultra thin films thinner than 10 nm is still a nontrivial task. This paper summarizes the prospects of high-resolution Elastic Recoil Detection (ERD) using a Q3D magnetic spectrograph. It is shown that sub-nanometer resolution can be achieved in ultra thin films and even monolayer resolution is possible close to the surface. ERD has the best quantification possibilities compared to any other method. Sensitivity is sufficient to analyze main elements and impurities as e; g, necessary for the characterization of microelectronic materials, In addition, high-resolution channeling ERD can be performed in order to obtain information on lattice location of light elements in crystalline ultra thin layers. The potential of high-resolution ERD is demonstrated by several applications where it is the most valuable tool for elemental profiling. «
The quantitative analysis of light elements in ultra thin films thinner than 10 nm is still a nontrivial task. This paper summarizes the prospects of high-resolution Elastic Recoil Detection (ERD) using a Q3D magnetic spectrograph. It is shown that sub-nanometer resolution can be achieved in ultra thin films and even monolayer resolution is possible close to the surface. ERD has the best quantification possibilities compared to any other method. Sensitivity is sufficient to analyze main elements... »