Dollinger, Günther; Faestermann, Thomas; Maier-Komor, Paul
Dokumenttyp:
Zeitschriftenartikel / Journal Article
Titel:
High resolution depth profiling of light elements
Zeitschrift:
Nuclear Instruments and Methods in Physics Research Section B
Jahrgang:
64
Heftnummer:
1-4
Jahr:
1992
Seiten von - bis:
422-427
Sprache:
Englisch
Abstract:
An elastic recoil detection analysis technique with swift heavy ions has been developed to measure high resolution depth profiles of light elements in thin films and multilayer systems. A depth resolution of 1 nm was achieved with a Q3D magnetic spectrograph using a high quality 120 MeV 197Au12 beam. The depth resolution was tested with 12C recoil ions from 12C/11B multilayers. Due to the large solid angle used (2 msr) and large scattering cross sections only low ion currents ( ≈ 109 ions s) are necessary for good statistics within a few minutes of irradiation. The method was applied to depth profile analysis of light elements in a-Si:H/a-SiC:H multilayer systems. Alterations in the multilayers induced by the heavy ion beam have been observed during long lasting irradiations and might limit the depth resolution when profiling small elemental concentrations. «
An elastic recoil detection analysis technique with swift heavy ions has been developed to measure high resolution depth profiles of light elements in thin films and multilayer systems. A depth resolution of 1 nm was achieved with a Q3D magnetic spectrograph using a high quality 120 MeV 197Au12 beam. The depth resolution was tested with 12C recoil ions from 12C/11B multilayers. Due to the large solid angle used (2 msr) and large scattering cross sections only low ion currents ( ≈ 109 ions s) are... »