David, A.; Kögel, Gottfried; Sperr, Peter; Triftshäuser, Werner
Dokumenttyp:
Zeitschriftenartikel / Journal Article
Titel:
Lifetime measurements with a scanning positron microscope
Zeitschrift:
Physical Review Letters
Jahrgang:
87
Heftnummer:
6
Jahr:
2001
Seiten von - bis:
674021-674024
Sprache:
Englisch
Abstract:
The visible and invisible damage to the defect structure of a GaAs wafer was identified by first lifetime measurements using the scanning positron microscope. A pulsed positron beam formed by cooling positrons from a radioactive source was scanned over an area of 0.6×0.6 mm 2. A scanning electron microprobe was also included in the system for surface analysis.