Login
Document type:
Zeitschriftenartikel / Journal Article
Title:
Hydrogen incorporation during nucleation and growth of c-BN films
Journal:
Diamond and Related Materials
Volume:
5
Issue:
9
Year:
1996
Pages from - to:
984-989
Language:
Englisch
Keywords:
c-BN growth ; c-BN nucleation ; ERD measurements ; Hydrogen incorporation
Abstract:
The hydrogen content of BN films deposited by the ICP plasma method from trimethyl borazine and N2 has been investigated integrally and spatially resolved by elastic recoil detection. Hydrogen contents between 15
ISSN:
0925-9635
Department:
Fakultät für Luft- und Raumfahrttechnik
Institute:
LRT 2 - Institut für angewandte Physik und Messtechnik
Chair:
Dollinger, Günther
Open Access yes or no?:
Nein / No
BibTeX