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Document type:
Konferenzbeitrag / Conference Paper
Title:
Implementation of a Simulation-Based Optimizer for Semiconductor Wafer Factories
Title of conference publication:
ETFA'06
Subtitle of conference publication:
IEEE Conference on Emerging Technologies and Factory Automation, 2006
Conference title:
IEEE Conference on Emerging Technologies and Factory Automation (2006, Prag)
Venue:
Prague, Czech Republic
Year of conference:
2006
Date of conference beginning:
20.09.2006
Date of conference ending:
22.09.2006
Publishing institution:
IEEE
Year:
2006
Pages from - to:
943-949
Language:
Englisch
ISBN:
0-7803-9758-4
Open Access yes or no?:
Nein / No
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