Logo
User: Guest  Login
Authors:
Brijs, Bert; Huyghebaert, C.; Nauwelaerts, S.; Caymax, M.; Vandervorst, Wilfried; Nakajima, Kaoru; Kimura, Kenji; Bergmaier, Andreas; Dollinger, Günther; Lennard, W. N.; Terwagne, G.; Vantomme, André 
Document type:
Zeitschriftenartikel / Journal Article 
Title:
Advanced characterization of high-k materials 
Subtitle:
A nuclear approach 
Journal:
Nuclear Instruments and Methods in Physics Research Section B 
Volume:
190 
Issue:
1-4 
Year:
2002 
Pages from - to:
505-509 
Language:
Englisch 
Keywords:
Characterization ; Composition ; Elasticity ; Microelectronics ; Rutherford backscattering spectroscopy ; Nuclear reactions ; Ultrathin films 
Abstract:
The determination of the composition of thin (1.5-3 nm) high-k layers ZrO2/Al2O3 becomes more and more important in microelectronics. High resolution Rutherford backscattering spectrometry and high resolution elastic recoil detection can achieve depth resolutions down to 1 nm while Rutherford backscattering spectrometry and nuclear reaction analysis are perfectly suited to quantify the zirconium, the oxygen and the aluminum content. The goal of this paper is to investigate the use of nuclear tec...    »
 
ISSN:
0168-583X 
Department:
Fakultät für Luft- und Raumfahrttechnik 
Institute:
LRT 2 - Institut für angewandte Physik und Messtechnik 
Chair:
Dollinger, Günther 
Open Access yes or no?:
Nein / No